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Studies on hysteresis reduction in thermally carbonized porous silicon humidity sensor

✍ Scribed by Bjorkqvist, M.; Paski, J.; Salonen, J.; Lehto, V.-P.


Book ID
120510298
Publisher
IEEE
Year
2006
Tongue
English
Weight
346 KB
Volume
6
Category
Article
ISSN
1530-437X

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Temperature dependence of thermally-carb
✍ Björkqvist, M. ;Paski, J. ;Salonen, J. ;Lehto, V.-P. 📂 Article 📅 2005 🏛 John Wiley and Sons 🌐 English ⚖ 103 KB

## Abstract Thermal carbonization of porous silicon (PS) at 820 °C under acetylene atmosphere is an appropriate method for humidity sensing purposes. It produces stable and hydrophilic surface still maintaining originally large specific surface area of PS. We report the temperature dependence of va