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Heavy ion induced intermixing at Ta/Si and Ta/SiO2 interfaces

✍ Scribed by W. Berky; A.G. Balogh; R.G. Elliman

Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 463 KB
Volume: 226
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2004.06.026

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