Ion beam mixing of an embedded Ta marker layer in Si induced by Al3, Cu2 and Ge2 clusters

✍ Scribed by Ping Shi; Fu-Rong Ding; Yao Wang; Rui Nie; Hong-Ji Ma

• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 177 KB
• Volume: 251
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2006.05.026