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H emission in the presence of dust in an Ar-C 2 H 2 radio-frequency discharge

✍ Scribed by Stefanovic, I; Kovacevic, E; Berndt, J; Winter, J

Book ID
120900952
Publisher
Institute of Physics
Year
2003
Tongue
English
Weight
300 KB
Volume
5
Category
Article
ISSN
1367-2630

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## Abstract Molecule and particle formation in a capacitively coupled radio‐frequency discharge has been investigated. Formation of molecular ions has been investigated by means of plasma process monitoring employing energydispersive mass spectrometry. Particle growth has been studied by recording