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Particle-in-cell/Monte Carlo simulation of radio frequency SiH4/H2 discharges

✍ Scribed by Yan, M.; Goedheer, W.J.

Book ID: 118208538
Publisher: IEEE
Year: 1999
Tongue: English
Weight: 279 KB
Volume: 27
Category: Article
ISSN: 0093-3813
DOI: 10.1109/27.799818

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