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Monte Carlo simulation of radio-frequency plasmas in N2

✍ Scribed by L. Settaouti; A. Settaouti

Publisher
John Wiley and Sons
Year
2011
Tongue
English
Weight
628 KB
Volume
24
Category
Article
ISSN
0894-3370

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✦ Synopsis

Abstract

The structure of radio‐frequency (rf) discharges in N~2~ is examined for the electrons and positive ions, in which electron–neutral collisions and ion–neutral collisions are taken into consideration. Some detailed properties of rf plasmas sustained by an rf source voltage of 13.56 MHz and an amplitude of 200 V are presented using Monte Carlo simulation in electropositive gas (N~2~). It is shown that most of the rf external electric field is absorbed in the sheath regions, whereas electrons respond easily to the oscillating rf electric field, ions cannot oscillate with the rf electric field. The oscillations of the electron cloud determine the instantaneous sheath thickness near each electrode. The mean energy and the density of charged particles are also discussed. Copyright Β© 2010 John Wiley & Sons, Ltd.

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