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Growth mechanism of electron density in radio frequency afterglow plasmas

✍ Scribed by Yasunori Ohtsu; Koji Shimizu; Hiroharu Fujita

Publisher: John Wiley and Sons
Year: 2001
Tongue: English
Weight: 251 KB
Volume: 135
Category: Article
ISSN: 0424-7760
DOI: 10.1002/eej.4

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✦ Synopsis

Abstract

Temporal evolutions of electrons have been investigated on extinction process in radio frequency (RF) afterglow plasmas using various gases. The electron density was found to increase just after the RF power was switched off, and then decayed. This density growth depended on the gas pressure and gas mixture ratio, especially the amount of Ar gas. The growth mechanism has been studied by considering collisions between the metastable atoms to account fully for the results. © 2001 Scripta Technica, Electr Eng Jpn, 135(2): 26–32, 2001

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