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An Analysis of Low Frequency Discharge in a CH3SiCl3-Ar-H2Mixture by Optical Emission Spectroscopy and Actinometry

✍ Scribed by Barbara Kułakowska-Pawlak; Piotr Jamróz

Book ID: 106491046
Publisher: Springer
Year: 2010
Tongue: English
Weight: 805 KB
Volume: 30
Category: Article
ISSN: 0272-4324
DOI: 10.1007/s11090-010-9238-3

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