Threading dislocation density reduction
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Bougrov, V. E. ;Odnoblyudov, M. A. ;Romanov, A. E. ;Lang, T. ;Konstantinov, O. V
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Article
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2006
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John Wiley and Sons
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English
β 216 KB
## Abstract A theoretical approach is proposed to reduce the density of threading dislocations (TDs) in (0001) oriented growth of GaN layers. The approach can be realized by repeated stages of growth surface roughening (stage I) and flattening (stage II). Fundamentals of the approach include the fo