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Growth of well-oriented AlxIn1−xN films by sputtering at low temperature

✍ Scribed by C.J. Dong; M. Xu; Q.Y. Chen; F.S. Liu; H.P. Zhou; Y. Wei; H.X. Ji

Book ID: 116604726
Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 298 KB
Volume: 479
Category: Article
ISSN: 0925-8388
DOI: 10.1016/j.jallcom.2009.01.075

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