Colorless, transparent, c-oriented aluminum nitride films grown at low temperature by a modified sputter gun

✍ Scribed by Onishi, S.

• Book ID: 120575229
• Publisher: American Institute of Physics
• Year: 1981
• Tongue: English
• Weight: 488 KB
• Volume: 39
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.92838