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Structural and optical properties of c-axis oriented aluminum nitride thin films prepared at low temperature by reactive radio-frequency magnetron sputtering

✍ Scribed by Aurelian C. Galca; George E. Stan; Liliana M. Trinca; C. Catalin Negrila; Leona C. Nistor

Book ID: 118033786
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 916 KB
Volume: 524
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2012.10.015

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