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Optical and structural properties of highly c-axis oriented aluminum nitride prepared by sputter-deposition in pure nitrogen

✍ Scribed by Tilo P Drüsedau; Jürgen Bläsing


Book ID
114085304
Publisher
Elsevier Science
Year
2000
Tongue
English
Weight
213 KB
Volume
377-378
Category
Article
ISSN
0040-6090

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