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Growth of Trumpet-Like Protrusions During the CVD of Silicon Carbide Films

✍ Scribed by Y. Kajikawa; H. Ono; S. Noda; H. Komiyama

Publisher
John Wiley and Sons
Year
2002
Tongue
English
Weight
332 KB
Volume
8
Category
Article
ISSN
0948-1907

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