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Growth of silicon nitride films by bombarding amorphous silicon with N+ ions: MD simulation

✍ Scribed by F. Gou; M.A. Gleeson; A.W. Kleyn; R.W.E. van de Kruijs; A.E. Yakshin; F. Bijkerk

Publisher: Elsevier Science
Year: 2009
Tongue: English
Weight: 534 KB
Volume: 267
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2009.06.091

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