✦ LIBER ✦
983. Crystallization of amorphous films of silicon nitride at ion bombardment with subsequent annealing: P V Pavlov et al, Kristallograf, 18 (3), 1973, 609–613
- Publisher
- Elsevier Science
- Year
- 1974
- Tongue
- English
- Weight
- 152 KB
- Volume
- 24
- Category
- Article
- ISSN
- 0042-207X
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