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Growth kinetics of low-temperature oxide films on silicon

✍ Scribed by L. I. Gurskii; V. M. Koleshko; B. S. Reznikov; I. V. Nekaryukin; A. A. Kovalevskii

Publisher
Springer US
Year
1974
Tongue
English
Weight
198 KB
Volume
27
Category
Article
ISSN
1573-871X

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