✦ LIBER ✦
Plasma anodization as a dry low temperature technique for oxide film growth on silicon substrates
✍ Scribed by Takuo Sugano
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 792 KB
- Volume
- 92
- Category
- Article
- ISSN
- 0040-6090
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