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Growth kinetics of laser chemical vapor deposited tungsten

✍ Scribed by T. Szörényi; K. Piglmayer; D. Bäuerle

Publisher
Elsevier Science
Year
1990
Tongue
English
Weight
487 KB
Volume
46
Category
Article
ISSN
1386-1425

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✦ Synopsis

The analysis of the time evolution of W spots deposited from WF6+H2 mixtures by an Ar+ laser reveals that at different partial pressure ratios different chemical pathways are preferred. For high p(H2)/p(WF6) ratios the rate limiting step is hydrogen desorption from the tungsten surface with an activation energy of 30-33 kcal/mol resulting in well-defined droplet-like patterns, while at low partial pressure ratios the formation of flat cone--like spots is preferred as a consequence of surface reactions of significantly lower activation energies (18-22 kcal/mol).

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