Growth by Liquid-Injection MOCVD and Properties of HfO2 Films for Microelectronic Applications

✍ Scribed by C. Dubourdieu; E. Rauwel; C. Millon; P. Chaudouët; F. Ducroquet; N. Rochat; S. Rushworth; V. Cosnier

• Publisher: John Wiley and Sons
• Year: 2006
• Tongue: English
• Weight: 516 KB
• Volume: 12
• Category: Article
• ISSN: 0948-1907
• DOI: 10.1002/cvde.200506397