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Deposition of BaHfO3 Dielectric Layers for Microelectronic Applications by Pulsed Liquid Injection MOCVD

✍ Scribed by Grzegorz Lupina; Mindaugas Lukosius; Christian Wenger; Piotr Dudek; Grzegorz Kozlowski; Hans-Joachim Müssig; Adulfas Abrutis; Raimondas Galvelis; Tomas Katkus; Zita Saltyte; Virgaudas Kubilius

Publisher: John Wiley and Sons
Year: 2009
Tongue: English
Weight: 294 KB
Volume: 15
Category: Article
ISSN: 0948-1907
DOI: 10.1002/cvde.200804272

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