✦ LIBER ✦
Growth and Characterization of Ti-Ta-O Thin Films on Si Substrates by Liquid Injection MOCVD for High-k Applications from Modified Titanium and Tantalum Precursors
✍ Scribed by Anjana Devi; Malte Hellwig; Davide Barreca; Harish Parala; Reji Thomas; Hans-Werner Becker; Ram. S. Katiyar; Roland A. Fischer; Eugenio Tondello
- Publisher
- John Wiley and Sons
- Year
- 2010
- Tongue
- English
- Weight
- 670 KB
- Volume
- 16
- Category
- Article
- ISSN
- 0948-1907
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