Growth and characterization of zirconium
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P.Y. Kuei; J.D. Chou; C.T. Huang; H.H. Ko; S.C. Su
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Article
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2011
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Elsevier Science
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English
β 843 KB
The growth and characterization of zirconium oxide (ZrO 2 ) thin films prepared by thermal oxidation of a deposited Zr metal layer on SiO 2 /Si were investigated. Uniform ZrO 2 thin film with smooth surface morphology was obtained. The thermal ZrO 2 films showed a polycrystalline structure. The diel