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MOCVD of zirconium oxide thin films: Synthesis and characterization

✍ Scribed by A.M. Torres-Huerta; M.A. Domínguez-Crespo; E. Ramírez-Meneses; J.R. Vargas-García

Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
583 KB
Volume
255
Category
Article
ISSN
0169-4332

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The growth and characterization of zirconium oxide (ZrO 2 ) thin films prepared by thermal oxidation of a deposited Zr metal layer on SiO 2 /Si were investigated. Uniform ZrO 2 thin film with smooth surface morphology was obtained. The thermal ZrO 2 films showed a polycrystalline structure. The diel