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Growth and characterization of yttrium oxide thin layers on silicon deposited by yttrium evaporation in atomic oxygen

✍ Scribed by Jan Hudner; Håkan Ohlsén; Eva Fredriksson

Book ID: 107868930
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 556 KB
Volume: 46
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(95)00084-4

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