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Growth and characterization of SiON thin films by using thermal-CVD machine

✍ Scribed by R.K. Pandey; L.S. Patil; J.P. Bange; D.R. Patil; A.M. Mahajan; D.S. Patil; D.K. Gautam

Book ID: 108233801
Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 332 KB
Volume: 25
Category: Article
ISSN: 0925-3467
DOI: 10.1016/j.optmat.2003.07.003

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