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Growth and characterization of a high-quality Al0.45Ga0.55N layer with AlGaN/AlN superlattices

✍ Scribed by Jeon, Seong-Ran; Park, Si-Hyun

Book ID
121608586
Publisher
The Korean Physical Society
Year
2013
Tongue
English
Weight
382 KB
Volume
63
Category
Article
ISSN
0374-4884

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## Abstract Crack‐free and low‐dislocation‐density AlGaN was successfully grown on grooved AlN layer. UV light‐emitting diodes (LEDs) with a peak wavelength of 330 nm on these AlGaN films were fabricated. The efficiency of the UV LEDs is found to be strongly affected by the crystalline quality of t