## Abstract Al~0.25~Ga~0.75~N films were grown on a grooved‐Al~0.25~Ga~0.75~N/ AlN/sapphire template by MOVPE. The dislocation density on the grooved areas was as low as 1 × 10^8^ cm^–2^. We fabricated a UVA light‐emitting diode grown on such an AlGaN underlying layer exhibiting an output power of
High-efficiency AlGaN based UV emitters grown on high-crystalline-quality AlGaN using grooved AlN layer on sapphire substrate
✍ Scribed by Iida, K. ;Watanabe, H. ;Takeda, K. ;Nagai, T. ;Sumii, T. ;Nagamatsu, K. ;Kawashima, T. ;Balakrishnan, K. ;Iwaya, M. ;Kamiyama, S. ;Amano, H. ;Akasaki, I. ;Bandoh, A.
- Publisher
- John Wiley and Sons
- Year
- 2007
- Tongue
- English
- Weight
- 269 KB
- Volume
- 204
- Category
- Article
- ISSN
- 0031-8965
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✦ Synopsis
Abstract
Crack‐free and low‐dislocation‐density AlGaN was successfully grown on grooved AlN layer. UV light‐emitting diodes (LEDs) with a peak wavelength of 330 nm on these AlGaN films were fabricated. The efficiency of the UV LEDs is found to be strongly affected by the crystalline quality of the underlying AlN. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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