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Grazing-angle RBS and channelling analysis of BF2+ implantation damage in silicon

✍ Scribed by Lin, Chenglu ;Zhou, Zuyou ;Hemment, P. L. F. ;Li, Xiaoqin ;Yang, Genqin ;Zhu, Wenhua ;Zou, Shichang

No coin nor oath required. For personal study only.

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