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A study of lattice damage in silicon induced by BF+2 ion implantation

✍ Scribed by Paek, Mun Cheol; Kwon, Oh Joon; Lee, Jeong Yong; Im, Ho Bin

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Effect of lattice damage on impurity dep

✍ M.C. Paek; H.B. Im; O.J. Kwon; S.W. Kang 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 633 KB

Near-surface damage created in silicon b

✍ Li Xiaoqin; Lin Chenglu; Yang Genqin; Zhou Zuyao; Zou Shichang 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 275 KB

High Temperature Implantation of Silicon

✍ Kachurin, G. A. ;Tyshchenko, I. E. ;Fedina, L. I. ;Wieser, E. ;Weise, Ch. 📂 Article 📅 1987 🏛 John Wiley and Sons 🌐 English ⚖ 575 KB

Dynamic simulation of damage accumulatio

✍ M. Posselt 📂 Article 📅 1995 🏛 Elsevier Science 🌐 English ⚖ 467 KB

Indium segregation to dislocation loops

✍ Noda, Taiji 📂 Article 📅 2003 🏛 American Institute of Physics 🌐 English ⚖ 690 KB

Comparative investigation of damage indu

✍ T. Lohner; Z. Tóth; M. Fried; N.Q. Khánh; Gen Qing Yang; Lin Chen Lu; Zou Shicha 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 341 KB