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Grain growth during transient annealing of As-implanted polycrystalline silicon films

โœ Scribed by Krause, S. J.; Wilson, S. R.; Paulson, W. M.; Gregory, R. B.


Book ID
120348624
Publisher
American Institute of Physics
Year
1984
Tongue
English
Weight
501 KB
Volume
45
Category
Article
ISSN
0003-6951

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