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Gettering of implanted Au in MeV?C implanted Si

✍ Scribed by S. Mohapatra; B. Joseph; B. Satpati; D.P. Mahapatras

Publisher: Springer
Year: 2005
Tongue: English
Weight: 483 KB
Volume: 82
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-005-3297-y

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