Depth profiles of MeV heavy ions implanted into Si and lithium triborate

✍ Scribed by Ke-Ming Wang; Bo-Rong Shi; Nelson Cue; Ding-Yu Shen; Feng Chen; Xue-Lin Wang; Fei Lu

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 289 KB
• Volume: 225
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2004.05.040