Monte Carlo Simulation of Channeled and Random Profiles of Heavy Ions Implanted in Silicon at High Energy (1.2 MeV)

✍ Scribed by Mazzone, A. M.

• Publisher: John Wiley and Sons
• Year: 1987
• Tongue: English
• Weight: 171 KB
• Volume: 102
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.2211020150