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Effect of implanted O on gettering of Au at dislocations in Si

✍ Scribed by S. Mohapatra; D.P. Mahapatra

Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
324 KB
Volume
129
Category
Article
ISSN
0921-5107

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The Au site in Er + Au-implanted silica has been investigated by X-ray absorption spectroscopy, after annealing at 600 Β°C in either neutral N 2 or reducing H 2 (4%):N 2 (95%) atmosphere. High-resolution X-ray fluorescence spectra collected near the Au L III -edge indicate the presence of oxidized Au