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Submicron confinement effect on electrical activation of B implanted in Si

✍ Scribed by E. Bruno; S. Mirabella; G. Impellizzeri; F. Priolo; F. Giannazzo; V. Raineri; E. Napolitani


Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
125 KB
Volume
124-125
Category
Article
ISSN
0921-5107

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