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The effects of the annealing time on helium implantation in Si

✍ Scribed by B.S. Li; C.H. Zhang; H.H. Zhang; Y.T. Yang; L.H. Zhou; L.Q. Zhang; Y. Zhang


Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
658 KB
Volume
268
Category
Article
ISSN
0168-583X

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