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Influence of the implantation and annealing parameters on the photoluminescence produced by Si hot implantation

✍ Scribed by U.S. Sias; M. Behar; H. Boudinov; E.C. Moreira

Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
176 KB
Volume
257
Category
Article
ISSN
0168-583X

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