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Ge volatilization products in high-k gate dielectrics

✍ Scribed by E. Golias; L. Tsetseris; A. Dimoulas; S.T. Pantelides

Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 998 KB
Volume: 88
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2010.07.041

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