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Gas phase and surface reactions in Si doping of GaAs by silanes

✍ Scribed by Harry K. Moffat; T.F. Kuech; Klavs F. Jensen; P.-J. Wang

Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 699 KB
Volume: 93
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(88)90589-1

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