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Gas phase and surface reactions in the MOCVD of GaAs from triethylgallium, trimethylgallium, and tertiarybutylarsine

✍ Scribed by Thomas R. Omstead; Penny M. Van Sickle; Peter W. Lee; Klavs F. Jensen

Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 623 KB
Volume: 93
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(88)90500-3

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