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Gas permeabilities in thermally grown silicon dioxide films

✍ Scribed by Yong-Long Li; Neville G. Pinto; H. Thurmon Henderson; Sun-Tak Hwang; Phu Nguyen

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 536 KB
Volume: 32
Category: Article
ISSN: 0921-5107
DOI: 10.1016/0921-5107(94)01175-3

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