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GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride

✍ Scribed by M. Bosund; P. Mattila; A. Aierken; T. Hakkarainen; H. Koskenvaara; M. Sopanen; V.-M. Airaksinen; H. Lipsanen

Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 239 KB
Volume: 256
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2010.05.085

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