✦ LIBER ✦
Surface passivation of InGaP/GaAs HBT using silicon-nitride film deposited by ECR–CVD plasma
✍ Scribed by L.T. Manera; L.B. Zoccal; J.A. Diniz; P.J. Tatsch; I. Doi
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 414 KB
- Volume
- 254
- Category
- Article
- ISSN
- 0169-4332
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