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Frequency and voltage dependency of interface states and series resistance in Al/SiO2/p-Si MOS structure

✍ Scribed by Hong Xiao; Shihua Huang

Book ID
113810386
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
291 KB
Volume
13
Category
Article
ISSN
1369-8001

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Analysis of frequency-dependent series resistance and interface states of In/SiO2/p-Si (MIS) structures
✍ A. Birkan Selçuk; N. Tuğluoğlu; S. Karadeniz; S. Bilge Ocak 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 506 KB

In this work, the investigation of the interface state density and series resistance from capacitance-voltage (C-V) and conductance-voltage (G/oÀV) characteristics in In/SiO 2 /p-Si metal-insulator-semiconductor (MIS) structures with thin interfacial insulator layer have been reported. The thickness