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Formation of β-FeSi2 with electron beam evaporation

✍ Scribed by Takashi Misaki; Jun Ohsawa


Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
876 KB
Volume
87
Category
Article
ISSN
8756-663X

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Optical properties of single-phase β-FeS
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Single-phase semiconducting iron disilicide (b-FeSi 2 ) films on silicon substrate were fabricated by electron beam evaporation (EBE) technique. For preventing the oxidation of Fe film, silicon/iron/silicon sandwich structure films with different thickness of silicon and iron were deposited and then