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Formation of ultra-thin PtSi layers with a 2-step silicidation process

✍ Scribed by R.A. Donaton; S. Jin; H. Bender; M. Zagrebnov; K. Baert; K. Maex; A. Vantomme; G. Langouche

Book ID
114155712
Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
449 KB
Volume
37-38
Category
Article
ISSN
0167-9317

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