𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Formation of the thermal donors in the hydrogen-implanted nitrogen-doped silicon crystal

✍ Scribed by I.V. Antonova; D. Yang; V.P. Popov; V.I. Obodnikov; A. Misiuk

Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
118 KB
Volume
66
Category
Article
ISSN
0167-9317

No coin nor oath required. For personal study only.

πŸ“œ SIMILAR VOLUMES

Donor formation in silicon owing to ion
Donor formation in silicon owing to ion implantation of the rare earth metal erbium
✍ F.P. Widdershoven; J.P.M. Naus πŸ“‚ Article πŸ“… 1989 πŸ› Elsevier Science 🌐 English βš– 317 KB

Schottky diodes in n-and pope silicon, implanted with erbium and subsequently annealed at 900 Β°C were characterized with capacitance-voltage (CV) and deep level transient spectroscopy (DL TS) techniques. The implanted samples showed an excess donor concentration with a depth profile similar to an er