✦ LIBER ✦

Formation of shallow junctions through BGe molecular ion implantation and rapid thermal annealing

✍ Scribed by J.H. Liang; Y.J. Sang

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Shallow junctions by ion implantation an

✍ Chris Hill 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 915 KB

Two-step post-annealing effects on the s

✍ J.H. Liang; Y.J. Sang 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 193 KB

Shallow-junction diode formation by impl

✍ Rubin, L.; Hoffman, D.; Ma, D.; Herbots, N. 📂 Article 📅 1990 🏛 IEEE 🌐 English ⚖ 808 KB

Post-annealing effects on shallow-juncti

✍ J.H. Liang; Y.J. Sang; C.-H. Wang; T.W. Wang; J.Y. Hsu; H. Niu; M.S. Tseng 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 179 KB

Effect of ramp rates during rapid therma

✍ Aditya Agarwal; Hans-J. Gossmann; Anthony T. Fiory 📂 Article 📅 1999 🏛 Springer US 🌐 English ⚖ 194 KB

Rapid thermal processing for simultaneou

✍ K. Maex; R.F. De Keersmaecker 📂 Article 📅 1985 🏛 Elsevier Science ⚖ 468 KB