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Shallow junctions by ion implantation and rapid thermal annealing

✍ Scribed by Chris Hill

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Formation of shallow junctions through B

✍ J.H. Liang; Y.J. Sang 📂 Article 📅 2004 🏛 Elsevier Science 🌐 English ⚖ 317 KB

Shallow junction formation by boron impl

✍ R. Kakoschke; K. Ehinger 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 446 KB

Effect of ramp rates during rapid therma

✍ Aditya Agarwal; Hans-J. Gossmann; Anthony T. Fiory 📂 Article 📅 1999 🏛 Springer US 🌐 English ⚖ 194 KB

Rapid thermal annealing of ion implanted

✍ S. G. Meikle; D. A. Thompson 📂 Article 📅 1987 🏛 Springer US 🌐 English ⚖ 401 KB

Shallow-junction diode formation by impl

✍ Rubin, L.; Hoffman, D.; Ma, D.; Herbots, N. 📂 Article 📅 1990 🏛 IEEE 🌐 English ⚖ 808 KB

Ion implant rapid thermal anneal interna

✍ C.B. Yarling; W. Andrew Keenan 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 451 KB